Piezoelectrical and Electrostrictive
Stack/Ring Actuators & Amplifiers
2.壓電致動器--堆疊式、管型、環狀和光學用之壓電晶體及電縮致動器
(Electrostrictive Actuator)
Posicon System/Feedback Controller for X-Y-Z translation stages / resolution
to 20 nanometer
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Piezomechanik GmbH Piezoelectrical and Electrostrictive Stack/Ring Actuators & Amplifiers |
1.高/低電壓(-200--+1000V)功率放大器(open/closed loop) 2.壓電致動器--堆疊式、管型、環狀和光學用之壓電晶體及電縮致動器 (Electrostrictive Actuator) Posicon System/Feedback Controller for X-Y-Z translation stages / resolution to 20 nanometer
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